Capabilities:
– Variable pressure SEM imaging on non-coated samples
– Energy Dispersive X-ray analysis (EDX)
Cost:
Academic users: $40/h, Industry users: $95/h
Specifications:
Electron Source: Thermionic tungsten gun
Accelerating voltage: 0.5 – 30 KV
Magnification: 40 – 300,000x
Variable Pressure: 1 – 270 Pa
Maximum Resolution: 5 nm
Secondary Electrons (SEs) and Back-Scattered Electron (BSE) detectors are available